EDS analysis detects x-rays emitted from the sample during bombardment by the SEM electron beam and characterizes the elemental chemical composition of the analyzed volume. EDS is capable of obtaining rapid qualitative chemical information, semi-quantitative composition determinations, maps showing lateral distribution of chemical elements, and compositional profiles across a surface. All stable elements can be detected with the exception of hydrogen, helium, and lithium. Our JEOL 6610LV is equipped with the latest silicon drift detector (SDD), which provides a very high x-ray throughput. This results in fast x-ray data acquisition, increased sensitivity to elements in small concentrations, and advanced spectral imaging. Together, SEM and EDS provide an excellent combination for efficient characterization of sample surfaces and the elements comprising specific near-surface features.